The EFEM wafer transfer equipment developed by SYU HE supports communication with OHT or AGV systems and features a user-friendly HMI interface for easy operation.

The Load Port section integrates mechanisms including a stepper motor door lifting system, pneumatic latch key, wafer mapping open/close function, vacuum suction FOUP door holding mechanism, and positioning mechanism, all of which are combined through optimized design to achieve higher operational efficiency.

In terms of sensing components, the Mapping Sensor can operate synchronously with the FOUP Door to accelerate mapping time. In addition, a wafer protrusion detection sensor is implemented to prevent accidental wafer damage, effectively reducing additional costs.

• Mean Time Between Failures (MTBF): ≧ 2,000 hours
• Mean Time To Repair (MTTR): ≦ 2 hours
• Mean Time To Failure (MTTF): ≧ 250 hours
• Average Damage-Free Operation Interval: ≧ 100,000 wafers
• Unmanned Operation Uptime: ≧ 99.5%